Erbium quantum memory platform with long optical coherence via back-end-of-line deposition on foundry-fabricated photonics

Phys. Rev. Applied 24, 054037 Realizing scalable quantum interconnects necessitates the integration of solid-state quantum memories with foundry photonics processes. While prior photonic integration efforts have relied upon specialized, laboratory-scale fabrication techniques, this work demonstrates the monolithic integration of a quantum memory platform with low-loss foundry photonic circuits via back-end-of-line deposition. We deposited thin films of […]